Automatic Optical Inspection System

FE-AOI
Model
FE-AOI-200
Category
FE-AOI

Summary

FE-AOI scans sample surfaces, performs optical imaging and algorithmic processing to obtain surface defect distribution, providing fast and reliable inspection data for various substrates, such as semiconductor wafers, glass substrates.

Utilizing bright-field and dark-field imaging, combined with planar grid scanning and data processing algorithms, the system can rapidly detect defects and micro-structures on substrate surfaces, including particle, scratch, and micro-hole analysis. Customized fluorescence imaging, Raman imaging, and second harmonic imaging are available.

Details

——  Diagram  ——

XY Grid Scan BF & DF Optical Detection

——  Automatic Loading Unit  ——

Automatical loading from cassetee to stage Automatical clamping

——  Image Sample  ——

Scratch Chipping TGV Holes Pinholes

——  Self-developed Image Processing Algorithm  ——

——  Specifications  ——

  FE-AOI-M FE-AOI-A Customize
Spatial resolution ～ 3 μm ～ 3 μm ～ 1 μm
Light source LED high-intensity light source LED high-intensity light source LED high-intensity light source, 
Raman Spectroscopy,
Fluorescence Spectrum,
SHG Imaing
Stage displacement accuracy 2 μm
Scan time <3 min / piece (diameter 6-inch)
Applicable wafer size maximum diameter 8-inch maximum diameter 8-inch maximum diameter 8-inch
Camera parameters DF: 16-bit;  2992 × 3000
BF: 8-bit; 3008 × 3000
Stage

Sample hangs on the stage.
Touch points are at the edge of the sample.
Replaceable stage.
± 125 mm (XY); ± 10 mm (Z)
Manually clamping

 Sample hangs on the stage.
Touch points are at the edge of the sample.
Replaceable stage.
± 125 mm (XY); ± 10 mm (Z)
Automatically clamping		 Customizable
Scratch detection Detection limit: 20 nm (depth)
Positive rate: equivalent to imported SiC defect detection equipment
Chipping detection Detection limit: 50 μm x 50 μm
Positive rate: >95% (100 μm x 50 μm)
Robot arm NA Single arm / Vac-sorb
Mapping, Flipping supported		 Customizable
Position alignment NA Vac-sorb Customizable
Cassette quantity supported NA 2 ～ 4  Customizable
Safety interlock door NA Proximity sensor on the door.
Power would be cut off when door opens.		 Customizable
Working voltage 220 V
Working temperature / relative humidity 5 ～ 40 ℃ / ＜ 80 %
Warranty period 1 Year