In-situ Microscopic Imaging CVD System

FE-CVD
Model
FE-CVD-Pro
Category
FE-CVD

Summary

By integrating a patented high-temperature resistant microscopic imaging system into the chemical vapor deposition (CVD) system, it enables in-situ high-resolution optical imaging of the material growth process. This provides real-time information on parameters such as material growth rate and micro-morphology, offering precise data for analyzing material growth mechanisms and engineering material growth processes.

The product can be applied to two-dimensional material growth, thin film growth, nano/microwire growth, high-temperature sintering, high-temperature etching, and more.

Customized spectral modules, such as Raman and second harmonic generation (SHG), are available.

Details

——  Diagram  ——

——  Image Sample  ——

——  Real-time in-situ Imaging of MoS2 Growth  ——


In-istu imaging of high-temperature liquid-phase growth processes


In-situ imaging of high-temperature gas-phase growth processes

——  Potential Application Fields  ——

Crystallization High-temperature Processing High-temperature Combustion Process

——  Specifications  ——

  FE-CVD-B FE-CVD-A FE-CVD-S
Imaging maximum working temperature 600 ℃ 900 ℃ ≤ 900 ℃
Spatial resolution 3 μm 3 μm ≥ 2 μm
Field range ≥ 1000 × 1000 μm ≥ 1000 × 1000 μm ≥ 200 × 200 μm
Objects lens working distance 60 mm 60 mm 20 mm / 60 mm
Camera bit depth 8-bit 8-bit Highest 16-bit
Imaging wavelength 532 nm 532 nm 532 nm
Imaging heating zone Zone 1 (Left Zone) Zone 1 (Left Zone) Left Zone / Right Zone
Heating zone quantity 2 zones 2 zones 2 zones
Zone length 20 cm (Left Zone) + 3 cm (Partition) + 10 cm (Right Zone) 20 cm (Left Zone) + 3 cm (Partition) + 10 cm (Right Zone) Customizable
Maximum quartz tube diameter 25.4 mm 50 mm 100 mm
Minimum temperature step ± 1 ℃ ± 1 ℃ ± 1 ℃
Working voltage 220 V 220 V 220 V
Working temperature / relative humidity 5 ～ 40 ℃ / ＜ 80 % 5 ～ 40 ℃ / ＜ 80 % 5 ～ 40 ℃ / ＜ 80 %
Warranty period 1 Year 1 Year 1 Year

 

  FE-CVD-ProB FE-CVD-ProA FE-CVD-ProS
Imaging maximum working temperature 900 ℃ 950 ℃ 950 ℃
Spatial resolution 1.5 μm 1 μm ≥ 1 μm
Field range ≥ 200 × 200 μm ≥ 200 × 200 μm ≥ 200 × 200 μm
Objects lens working distance 20 mm 20 mm 20 mm
Camera bit depth 16-bit 16-bit Highest 16-bit
Imaging wavelength 532 nm 532 nm 532 nm
Imaging heating zone Zone 1 (Left Zone) Zone 1 (Left Zone) Left Zone / Right Zone
Heating zone quantity 2 zones 2 zones 2 zones
Zone length 20 cm (Left Zone) + 3 cm (Partition) + 10 cm (Right Zone) 20 cm (Left Zone) + 3 cm (Partition) + 10 cm (Right Zone) Customizable
Maximum quartz tube diameter 25.4 mm 50 mm 100 mm
Minimum temperature step ± 1 ℃ ± 1 ℃ ± 1 ℃
Working voltage 220 V 220 V 220 V
Working temperature / relative humidity 5 ～ 40 ℃ / ＜ 80 % 5 ～ 40 ℃ / ＜ 80 % 5 ～ 40 ℃ / ＜ 80 %
Warranty period 1 Year 1 Year 1 Year